WI-6500 Wafer Defect Inspection System

WI-6500 Wafer Defect Inspection System

Description

WI-6500 supports 25 wafer automatic-defect inspection systems. 25 6-inch wafers are carried into the system inspection wafer cassette by the shipping wafer cassette, the equipment closes the hatch. The vision system scans the number and position of the wafers in the cassette, and then the robot arm moves the wafer to the pre-aligner to align the wafers.

The wafer then will be transferred to the front defect inspection module tray for rapid defect detection and extraction of defective images. After the inspection is completed, the system generates a defect map and simultaneously stores the result in the production line system database for operators and engineers to analyze the situation of defect of products.

Specifications

Defect detection system

Detection type

Brightfield and darkfield

OK

Imaging type

Color / black and white

OK

Detection magnification

1.25X, 2.5X, 5X, 10X, 20X

OK

Defect review

Manual / automatic defect review

OK

Measurement results upload to production line system

Interface test results with production line systems

OK

Automatic classification of defects

Quickly and accurately classify and summarize defect areas, sizes, etc.

OK

Measurement time

Each wafer ≤30min (6inch)

OK

Defect capture rate

Typical: 99% @3 pixels size defects

OK

Defect loss rate

Typical: 1%

OK

Recheck rate

Typical: 1%

OK

Anti-vibration platform

The device needs to be equipped with a vibration isolation platform to prevent detection results from being disturbed  by external vibrations

OK

Silicon wafer stage

Compatible wafer size

6 inch / 8 inch wafer

OK

Autofocus

The lens is equipped with a Z-axis motor for automatic focusing

OK

XY and rotary stage

XY-direction tage is required for inspection, and rotation stage is required for calibration

OK

Automatic loading

Equipment loading

One wafer cassette at a time, at least 25 wafers one cassette

OK

Pre-calibration

Automatic pre-calibration before loading into wafer chuck

OK

Submodule

Automatic loading can be used as a sub-module, optional according to user needs

OK

Donwload


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